JPH0463567B2 - - Google Patents
Info
- Publication number
- JPH0463567B2 JPH0463567B2 JP3405483A JP3405483A JPH0463567B2 JP H0463567 B2 JPH0463567 B2 JP H0463567B2 JP 3405483 A JP3405483 A JP 3405483A JP 3405483 A JP3405483 A JP 3405483A JP H0463567 B2 JPH0463567 B2 JP H0463567B2
- Authority
- JP
- Japan
- Prior art keywords
- axis
- crystal
- angle
- degrees
- crystal piece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000013078 crystal Substances 0.000 claims description 97
- 238000002474 experimental method Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 238000005520 cutting process Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
- H03H9/02023—Characteristics of piezoelectric layers, e.g. cutting angles consisting of quartz
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02157—Dimensional parameters, e.g. ratio between two dimension parameters, length, width or thickness
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3405483A JPS59158612A (ja) | 1983-03-01 | 1983-03-01 | 厚みすべり水晶振動子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3405483A JPS59158612A (ja) | 1983-03-01 | 1983-03-01 | 厚みすべり水晶振動子 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5185103A Division JP2545692B2 (ja) | 1993-07-27 | 1993-07-27 | 厚みすべり水晶振動子の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59158612A JPS59158612A (ja) | 1984-09-08 |
| JPH0463567B2 true JPH0463567B2 (en]) | 1992-10-12 |
Family
ID=12403568
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3405483A Granted JPS59158612A (ja) | 1983-03-01 | 1983-03-01 | 厚みすべり水晶振動子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59158612A (en]) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2545692B2 (ja) * | 1993-07-27 | 1996-10-23 | セイコープレシジョン株式会社 | 厚みすべり水晶振動子の製造方法 |
| CN100488047C (zh) | 2003-07-18 | 2009-05-13 | 日本电波工业株式会社 | Sc切割晶体谐振器 |
-
1983
- 1983-03-01 JP JP3405483A patent/JPS59158612A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59158612A (ja) | 1984-09-08 |
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